[사진공정]사진공정(파워포인트 확실한 자료)

소개글

전반적인 사진공정
Photo Resist의 특성별 분류
Resolution 향상을 위한 여러가지 방법
차세대 사진공정
3차원 사진공정
Example
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목차

Photolithograpy overview
Critical Dimension, Overall Resolution
Resist Profile
Resolution in Photolithography
Next-Generation lithography
Emerging Lithography
Example

본문내용

1. Photolithography Overview
Introduction
In the IC industry, pattern transfer from masks onto thin films is accomplished almost exclusively via photolithography

Mask
The stencil used to repeatedly generate a desires pattern on resist- coated wafers is called a mask
Types of MASK
Hard surface MASK
Made by Cr, FeO on glass
Permanence, Expensive
Emulsion MASK
Made by thin gelatin file on thin glass
Semi-Permanence(3 ~ 5 times), Cheapness

참고 자료

Fundamentals of MICROFABRICATION